Automated transport cassette clean oven
Introducing the automatic cassette clean oven with conveyor that can process one set at a time!
We would like to introduce our product, the "Automatic Transport Cassette Clean Oven." It accommodates 6 sets of 25 pieces of 8" wafers in one cassette, using one clean oven along with loaders and unloaders equipped with transport robots. It is designed to process one set at a time. The transport method can be either automatic or manual, and the maximum temperature inside the clean oven is 140°C. The external dimensions are 2590 (W) × 1400 (D) × 2400 (H). 【Main Specifications】 ■ Processed wafers: 6 cassettes of 25 pieces of 8" quartz wafers ■ Transport method: Automatic / Manual ■ Maximum temperature inside the clean oven: 140°C ■ Cleanliness inside the clean oven: Class 10 at 0.3μm RT ■ External dimensions: 2590 (W) × 1400 (D) × 2400 (H) *For more details, please refer to the PDF document or feel free to contact us.
- Company：ダン科学
- Price：Other
